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Thin Film Deposition
The Importance of Thin Film Deposition
Thin Film Deposition depends on many factors and it important for material properties. Different factors such as Substrate Temperature, Gas Composition, Flow Direction , Pressure, Reactor Geometry, Electrode Configuration, Power Level and Frequency.
Thin Film Deposition
Molecular Beam Epitaxy
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Chemical Vapor Deposition (CVD)
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Chemical Vapor Deposition
1) Temperature of the Reactors is measured by thermocouples or optical pyrometers.
2) Quantities & Compositions of gas flow rates are monitored by rotameters. Presently electronic gas flow meters are used which have the advantage of process automation.
3) The pressure can be varied by changing flow rates of gases entering the reactor, while keeping the pumping rate constant or changing the pumping speed by using a throttle valve.
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Plasma Enhanced Chemical Vapor Deposition (PECVD)
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PECVD Requirements
1) Reactor Deposition Chamber
2) Electronic Power Source
3) Impedance Matching Network
4) Gas Flow Regulators
5) Pressure Measurement
6) Panel Instrumentation
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Hot Wall Reactors
Low Temperature Reactor (LTR)
Low Temperature Reactor (LTR)
Hot Wall reactors are tubular in design. Have low gas velocities and are used and a fully developed laminar flow exists. A gas panel supplies chemical, dopants and carrier gases.
Used to deposit polysilicon , Silicon Dioxide and Silion Nitride films.
Low Temperature Reactor (LTR)
Low Temperature Reactor (LTR)
Low Temperature Reactor (LTR)
(350-450 C). LTR's are used in Semiconductor processing. Deposits passivation layers like Silicon Nitride over Aluminum. Dilute gases are being supplied and are usually mixed and dispersed at the point of entry. Mixed gas passes over the heated substrates. Heat is supplied by R.F or Resistance Heating.
Requires: Careful optimization of dynamics to obtain uniform thickness and compositions.
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Low Temperature Reactor (LTR)
Display real testimonials
Are your customers raving about you on social media? Share their great stories to help turn potential customers into loyal ones.
Promote current deals
Promote current deals
Display real testimonials
Running a holiday sale or weekly special? Definitely promote it here to get customers excited about getting a sweet deal.
Share the big news
Promote current deals
Share the big news
Have you opened a new location, redesigned your shop, or added a new product or service? Don't keep it to yourself, let folks know.
Display their FAQs
Promote current deals
Share the big news
Customers have questions, you have answers. Display the most frequently asked questions, so everybody benefits.